BEGIN:VCALENDAR
VERSION:2.0
PRODID:-//SBIR Signal//Deadline Calendar//EN
CALSCALE:GREGORIAN
METHOD:PUBLISH
X-WR-CALNAME:SBIR/STTR deadline
BEGIN:VEVENT
UID:sbir-opportunity-4423@sbirsignal
DTSTAMP:20260909T204939Z
DTSTART;VALUE=DATE:20261021
DTEND;VALUE=DATE:20261022
SUMMARY:Scalable Hard-mask materials with Improved Etch resistance and Low 
 Degradation for Extreme-aspect-Ratio fabrication (SHIELDER) — STTR deadlin
 e
DESCRIPTION:DARPA STTR topic closes on 2026-10-21. Topic DPA26TZ06-DV004. h
 ttps://sbirsignal.com/opportunity/4423
URL:https://sbirsignal.com/opportunity/4423
END:VEVENT
END:VCALENDAR