ENGENIUSMICRO LLC — Department of Defense SBIR Phase I: A20-011

Description

Sensitivity enhancement of optical inertial sensors has shown to be possible by using anomalous dispersion media. Although the scale factor and signal to noise ratio can be greatly improved by exploiting anomalous dispersion the signal extinction is a major issue. This proposal offers a compact and robust implementation of a micro optical cavity with a significantly shorter optical path than previously attempted efforts. The goal is not only to demonstrate the benefits of anomalous dispersion for inertial sensors, but also create a robust, passively-aligned CMOS-fabricated cavity, eliminating much of the complexity inhibiting production and manufacturability. Several technologies are leveraged to accomplish this including spherical and 45° micromirrors, kinematic constraints using V-groves, and precise bonding at the die level. The dispersive media cell design will leverage dispensers that eliminate the need for highly specialized high-vacuum equipment and ensure the quality of the media cell. The integration of a microoptical cavity with dispersive media will enable shorter path lengths and less attenuation in the optical path.