ENERTIA MICROSYSTEMS INC — Department of Defense SBIR Phase I: N211-012
ENERTIA MICROSYSTEMS INC — SBIR Phase I award from Department of Defense.
- Amount
- $239,923
- Agency
- Department of Defense · Navy
- Program / Phase
- SBIR · Phase I
- Topic
- N211-012
- Solicitation
- 21.1
- NAICS
- —
- Place of performance
- MI
- Period
- 2021-06-29 → 2022-08-22
Description
EMI proposes to develop a novel digital self-calibration and compensation algorithm and a novel fabrication process for the fused silica birdbath resonator gyroscope (BRG). The mechanical resonator of the BRG is made of fused silica and has a shape of an inverted wineglass or a birdbath. The resonator has a mechanical quality factor (Q) on the order of 1-5 million. At the University of Michigan, a prototype BRG demonstrated a short-term in-run bias stability (0.0014 deg/hr) and angle random walk (ARW = 0.00016 deg/sqrt(hr)) at room temperature without temperature control. Digital algorithms for bias and scale factor due to long term Q change, drive and sense electrode misalignment, capacitive feedthrough, and electrode-to-shell misalignment will be developed. A low-cost dual-layer vacuum packaging process will be developed to obtain excellent vacuum pressure level and excellent vacuum leakage rate.