PHOTONWARES CORP — Department of Defense SBIR Phase I: A18-129

Description

Based on our MEMS fabrication and optical system production experience, Photonwares proposes to realize a novel beam scanner that holds the promise of meeting all the program required performance. The proposed scanner is based on the same mechanism as the conventional back and forth moving magnet galvanometer, but with an entirely new planar configuration. Its rotating rotor is made of a low mass silicon wafer that is also the mirror. The design provides salient advantages of extremely low inertia for precision feedback control, ultra lightweight for vibration resistance, and increased rotor stiffness that raises the galvanometer’s resonant frequency. Furthermore, it eliminates mechanical frictions associated with the conventional contact based axis and gears, extending operation life. The proposed MEMS beam scanners can be produced on a single wafer using semiconductor mass production methods with remarkable reproducibility and precision at very low cost. The prototype device will be fabricated to demonstrate feasibility in Phase I.