Checkpoint Technologies LLC — Department of Defense SBIR Phase I: DMEA172-002
Checkpoint Technologies LLC — SBIR Phase I award from Department of Defense.
- Amount
- $150,000
- Agency
- Department of Defense · Defense Microelectronics Activity
- Program / Phase
- SBIR · Phase I
- Topic
- DMEA172-002
- Solicitation
- 2017.2
- NAICS
- —
- Place of performance
- CA
- Period
- 2018-08-16 → 2019-02-15
Description
The objective of this proposal is to demonstrate the feasibility of the innovative development of a tool that can be integrated into an IR microscope that is able to create fiducial marks on the surface of the backside of silicon.The current state-of-art in semiconductor device analysis involves procedures that begin with the identification of areas of interest under an IR microscope and then those areas are milled with a focused ion beam and imaged using a scanning electron microscope.There is no system in place within these IR microscopes to generate fiducial marks for reference during later processing and imaging steps.Checkpoint Technologies has a long history of providing IR micrscopes that use NIR CCD cameras and NIR laser probes.The addition of this marking system will provide a key capability to link multiple processes that connect an array of equipment from various sources.