Innoveering, LLC — Department of Commerce SBIR Phase I: 9.01.05

Description

Chemical manufacturers require high accuracy and high sensitivity pressure sensors to efficiently monitor the various manufacturing systems and processes in the chemical plant, to ensure any changes proceed in a safe and reliable manner, adhering to expected standards and practices. In addition, NIST has a need for highly accurate absolute and differential pressure measurements, especially for determining the thermo-physical properties of fluids. Such measurements must be made at the highest standard possible. Since the market is currently limited in the availability of such pressure sensors, i.e. possessing a combination of high accuracy/high temperature capability with excellent accuracy, NIST is seeking a high temperature, in situ, pressure sensor that can achieve better performance than the current state-of-the-art. Innoveering will develop an innovative, compact High Temperature High Resolution (HTHR) in-situ differential pressure (DP) sensor that leverages our team’s MEMs pressure die technology, which utilizes piezo-resistive elements to sense differential pressure as well as an over-pressure protection feature to ensure reliable and safe operation to meet NIST’s requirements. Our team brings together experts in the design/fabrication/testing and application of harsh environment pressure sensors, MEMS microfabrication techniques as well as packaging/welding techniques for these types of high pressure high temperature sensors.