SUNDEW TECHNOLOGIES LLC — Department of Defense SBIR Phase I: This Phase I proposal targets the development of commercially viable silicon-nitride (SiN)

SUNDEW TECHNOLOGIES LLC — SBIR Phase I award from Department of Defense.

Amount
$149,808
Agency
Department of Defense · Navy
Program / Phase
SBIR · Phase I
Solicitation
2012.1
NAICS
Place of performance
CO
Period
2012-05-01 → 2013-05-31

Description

This Phase I proposal targets the development of commercially viable silicon-nitride (SiN) Atomic Layer Deposition (ALD) process for gallium nitride (GaN) Monolithic Microwave Integrated Circuits (MMICs) applications. In particular, this project objective is to provide a higher quality substitution for SiN passivation layers, currently grown by Plasma Enhanced Chemical Vapor Deposition (PECVD). These better passivation layers will enable the development and manufacturing of GaN MMICs with ground-breaking impact on performance, power efficiency, size and cost of many military systems and commercial products.