MARITIME APPLIED PHYSICS CORPORATION — Department of Defense STTR Phase I: A big challenge in atomic layer deposition (ALD) of complex metal oxides is that the ALD t
MARITIME APPLIED PHYSICS CORPORATION — STTR Phase I award from Department of Defense.
- Amount
- $99,991
- Agency
- Department of Defense · Army
- Program / Phase
- STTR · Phase I
- Solicitation
- 2012.A
- NAICS
- —
- Place of performance
- MD
- Period
- 2012-09-13
Description
A big challenge in atomic layer deposition (ALD) of complex metal oxides is that the ALD temperature for one constituent oxide is often different from that of another. Researchers at University of California Los Angeles (UCLA), have developed thermal and radical enhanced ALD processes to address these concerns and realized the synthesis of many complex metal oxides, including PZT. Maritime Applied Physics Corporation (MAPC) is teaming up with UCLA to leverage this previous research and develop atomic layer deposition of PZT for MEMS scale actuation.