STRUCTURED MATERIALS INDUSTRIES, INC. — Department of Defense STTR Phase I: In this STTR program, Structured Materials Industries, Inc. (SMI) will develop process tec

STRUCTURED MATERIALS INDUSTRIES, INC. — STTR Phase I award from Department of Defense.

Amount
$100,000
Agency
Department of Defense · Army
Program / Phase
STTR · Phase I
Solicitation
2012.A
NAICS
Place of performance
NJ
Period
2012-09-13

Description

In this STTR program, Structured Materials Industries, Inc. (SMI) will develop process technology to deposit uniform films of piezoelectric PbZrxTi1-xO3, on substrates with complex 3-dimensional topography. Piezoelectric PbZrxTi1-xO3 films are a critical technology for advanced Micro Electro Mechanical System (MEMS), to provide low power actuation in nanoscale devices. Our technical approach is based on atomic layer deposition (ALD), which can achieve the required uniform film deposition over the extreme topography of advanced MEMS. The successful conclusion of this work will enable the development of micro robotic devices, for future biomedical, imaging and communication applications.