LUMARRAY, INC. — Department of Defense STTR Phase II: This Phase II STTR proposal seeks to enhance the throughput and resolution of LumArray&quo
LUMARRAY, INC. — STTR Phase II award from Department of Defense.
- Amount
- $749,934
- Agency
- Department of Defense · Air Force
- Program / Phase
- STTR · Phase II
- Solicitation
- 2010.B
- NAICS
- —
- Place of performance
- MA
- Period
- 2012-09-20
Description
This Phase II STTR proposal seeks to enhance the throughput and resolution of LumArray"s maskless photolithography system, the ZP-150, so that it meets the needs of photonic systems for high-fidelity, long-range spatial-phase coherence, full-wafer coverage, 3D structuring, patterning on non-flat surfaces, and sub-100 nm resolution. The ZP-150 is designed for compatibility with research as well as customized manufacturing of electronics, photonics and other products that employ micro- and nanoscale features. To exercise and demonstrate the enhanced performance achieved in the ZP-150, complex photonic-device structures will be written as well as computer-generated holograms and a diffractive-optical solar converter with over 30% photovoltaic efficiency. To achieve the desired enhancements, 7 specific tasks are proposed.