APPLIED THIN FILMS, INC — National Aeronautics and Space Administration SBIR Phase I: S13

Description

This Phase I investigation is focused on demonstration of both capacitors and inductors based on an innovative micron-scale thick high temperature stable dielectric film (Cerablakreg; UTF) deposited on suitable metal substrates to form MIM capacitors or coating on metal wire to form inductors on an insulating core material.nbsp;nbsp; Cerablakreg; UTF is a transparent ultra-thin film with excellent dielectric characteristics made of aluminophosphate oxide material derived from a patented chemical precursor system.nbsp;nbsp; Cerablakreg; UTF h as excellent adhesion to most metal substrates and also serves as a highly effective diffusion barrier to protect the metal substrate from harsh environments.nbsp; Previous studies, including recent GEER testing, has confirmed the robust stability and protective nature of Cerablakreg; UTF films.nbsp; Phase I effort will include fabrication of suitable prototype specimens of both capacitors and inductors with the objective to downselect suitable MIM designs and identify metal wire based on laboratory scale prolonged high temperature exposure conditions.nbsp;nbsp; Suitable specimens will be delivered to NASA for GEER and other testing.